IEDF in an RF Plasma
Description
Simulation of the IEDF in an RF plasma.
(c) A. von Keudell, Ruhr University Bochum, International School on Low Temperature Plasmas and Applications
27th International School on Low Temperature Plasma Physics: Basics and Applications
Simulation of the IEDF in an RF plasma.
(c) A. von Keudell, Ruhr University Bochum, International School on Low Temperature Plasmas and Applications