Isotropic Etching
Description
MC simulation of isotropic etching of a trench through a phtomask.
(c) A. von Keudell, Ruhr University Bochum, International School on Low Temperature Plasmas and Applications
28th International School on Low Temperature Plasma Physics: Basics and Applications
MC simulation of isotropic etching of a trench through a phtomask.
(c) A. von Keudell, Ruhr University Bochum, International School on Low Temperature Plasmas and Applications