29th International on School on Low Temperature Plasma Physics: Basics and Applications in 2026

List of teacher of the 29th International School on Low Temperature Plasma Physics and its Master Class 2026

  • Luís L. Alves (Lisbon Technical University, Portugal)
  • Margarita Baeva (INP Greifswald, Germany)
  • Jan Benedikt (Kiel University, Germany)
  • Annemie Bogaerts (University of Antwerp, Belgium)
  • Marc Böke (Ruhr-University Bochum, Germany)
  • Zdeněk Bonaventura (Masaryk University, Czech Republic)
  • Jean-Paul Booth (Ecole Polytechnique, France)
  • Diederik Depla (Ghent University, Belgium)
  • Pavel Dvořák (Masaryk University, Czech Republic)
  • Richard Engeln (ASML, The Netherlands)
  • Olivier Guaitella (École Polytechnique, France)
  • Tomáš Hoder (Masaryk University, Czech Republic)
  • Sylvain Iséni (GREMI Orléans, France)
  • Libor Juha (PALS/HiLASE, Czech Republic)
  • Holger Kersten (Christian-Albrechts-Universität Kiel, Germany)
  • Stephanos Konstantinidis (University of Mons, Belgium)
  • Zdenko Machala (University of Bratislava, Slovakia)
  • Tony Murphy (CSIRO, Australia)
  • Sander Nijdam (TU/e, The Netherlands)
  • Victor Pasko (PennState, USA)
  • Marina Prenzel (Ruhr-University Bochum, Germany)
  • Francesco Taccogna (ISTP Bari, Italy)
  • Antonio Tejero-del-Caz (University of Cordoba, Spain)
  • Jan Trieschmann (CAU Kiel, Germany)
  • Richard van den Sanden (DIFFER, The Netherlands)
  • Achim von Keudell (Ruhr-University Bochum, Germany)

Luís L. Alves (Lisbon Technical University, Portugal)

Luís L. Alves was born in Lisbon, Portugal. He is a full professor at the Department of Physics of IST, and the Head of the group N-Plasmas Reactive: Modelling and Engineering (N-PRiME) of Instituto de Plasmas e Fusão Nuclear (IPFN) with IST. His research focuses on the modelling and simulation of low-temperature plasmas, using a research methodology that involves the problem formulation, the development, verification and benchmarking of numerical tools, and the validation of the physical models by comparison with the experiment. Over the years he has developed many different numerical codes, extending from the numerical solution of the electron Boltzmann equation to the development of multi-dimensional dynamic models for reactive gas/plasma systems of interest for material science, biological and environmental applications. He is responsible for the development of the LisbOn KInetics (LoKI) simulation tools for plasma chemistry. Currently, he is member of the Scientific Council of IST and an Associate Editor of Plasma Sources Science and Technology.


Key publications:
  1. A reaction mechanism for oxygen plasmas. T C Dias, C Fromentin, L L Alves, A Tejero-del-Caz, T Silva, V Guerra, Plasma Sources Sci. Technol. 32 084003 (2023)
  2. The LisbOn KInetics Boltzmann solver. A Tejero-del-Caz, V Guerra, D Gonçalves, M Lino da Silva, L Marques, N Pinhão, C D Pintassilgo, L L Alves, Plasma Sources Sci. Technol. 28 043001 (2019)
  3. Foundations of modelling of nonequilibrium low-temperature plasmas. L L Alves, A Bogaerts, V Guerra, M M Turner, Plasma Sources Sci. Technol. 27023002 (2018)

Jan Benedikt (Kiel University, Germany)

Jan Benedikt is a full professor at Kiel University in the field of atmospheric and low-pressure non-equilibrium plasma physics with focus on plasma diagnostic, plasma-surface interaction including the field of plasma medicine and interaction with liquids, and on synthesis of nanoparticles, nanomaterials, and thin films especially with respect to understanding of growth mechanisms and plasma-chemistry pathways. He studied physics, and especially plasma physics, at the University of West Bohemia, Plzen, Czech Republic, and obtained his PhD at the Eindhoven University of Technology (2004). He was awarded Hans-Werner-Osthoff Plasma Physics Prize in 2009 and John Coburn and Harold Winters Student Award in Plasma Science and Technology at AVS conference in 2003. He is author of eighty-five peer-reviewed articles including four review articles, and has been invited more than forty times to give an invited conference talk or lecture course.


Key publications:
  1. Summarizing results on the performance of a selective set of atmospheric plasma jets for separation of photons and reactive particles. S Schneider, F Jarzina, J-W Lackmann, J Golda, V Layes, V Schulz-von der Gathen, J Bandow, J Benedikt, J. Phys.D: Appl. Phys. 48 (2015) 444001
  2. Quadrupole Mass Spectrometry of Reactive Plasmas. J Benedikt, A Hecimovic, D Ellerweg, A von Keudell, J. Phys. D: Appl. Phys. 45 (2012) 403001
  3. Plasma-chemical reactions: low pressure acetylene plasmas. J Benedikt, J. Phys. D 43 (2010) 043001

Annemie Bogaerts (University of Antwerp, Belgium)

Annemie Bogaerts was born in 1971 and obtained her PhD in Sciences in 1996 from University of Antwerp (Belgium). She is full professor in physical chemistry at University of Antwerp. She is head of the interdisciplinary research group PLASMANT, composed of chemists, physicists, engineers, biologists and biomedical researchers. Her research focuses on plasma chemistry, plasma reactor design and plasma-surface interactions (incl. solid catalysts, liquids and biomolecules), by computer modelling and experiments, mainly for applications in green chemistry (e.g., plasma-based CO2 and CH4 conversion, N2 fixation for green fertilizer production, green H2 synthesis,…) and plasma medicine (mainly cancer research). Her group counts ca. 50 members. Since 2005, she was the supervisor of 71 defended PhD theses. She published over 700 peer-reviewed papers since 1995 (and about 25 invited book chapters), with ca. 50,000 citations in Google Scholar (h-index = 110). She has about 280 plenary or invited lectures at international conferences or institutes since 1995. She is also co-inventor of 15 patent applications since 2019, and co-founder of 2 spin-off companies of her research group.


Key publications:
  1. R. Snoeckx and A. Bogaerts, Plasma technology – a novel solution for CO2 conversion? Chem. Soc. Rev. 46, 5805-5863 (2017)
  2. J. Van Turnhout, K. Rouwenhorst, L. Lefferts and A. Bogaerts, Plasma catalysis: What is needed to create synergy? EES Catalysis, 3, 669-693 (2025)
  3. A. Bogaerts, Plasma technology for the electrification of chemical reactions, Nature Chem. Eng. 2, 336-340 (2025)

Marc Böke (Ruhr-University Bochum, Germany)

Marc Böke was born in Bochum, Germany, on November 15, 1972. He received his PhD degree in Physics at Ruhr-University Bochum (RUB) with a PhD thesis dealing with Lithium atoms as probes for reactive plasmas. After his PhD he worked as executive secretary of Arbeitsgemeinschaft Plasmaphysik (APP) & Center of Excellence Plasma Science and Technology (CPST) at Ruhr-University Bochum. He is PI in several collaborative research projects at the Research Department Plasmas with Complex Interactions at RUB and works on diagnostic methods of low temperature plasmas, physics of microplasmas and plasma technology (e.g. plasma coatings on polymers). As a co-founder of a spin-off company in the field of plasma technology he was involved in the design of plasma sources for coating, functionalization or sterilization applications. Since 2001 he is responsible for the organization and the scientific concept of the school.


Key publications:
  1. Modeling and simulation of the plasma absorption probe. M Lapke, T Mussenbrock, and R P Brinkmann, C Scharwitz, M Böke, J Winter, Appl. Phys. Lett. 90, (2007) 121502, doi:/10.1063/1.2714202
  2. High Power Impulse Magnetron Sputtering Discharges: Instabilities and Plasma Self-Organization. AP Ehiasarian, A Hecimovic, T de los Arcos, R New, V Schulz-von der Gathen, M Böke, and J Winter, Appl. Phys. Lett. 100, (2012) 114101, doi: 10.1063/1.3692172
  3. Space resolved density measurements of argon and helium metastable atoms in radio-frequency generated He-Ar micro-plasmas. B Niermann, M Böke, N Sadeghi, and J Winter, Eur. Phys. J. D 60, (2010) 489-495, doi:10.1140/epjd/e2010-00166-8

Zdeněk Bonaventura (Masaryk University, Czech Republic)


Key publications:

Jean-Paul Booth (Ecole Polytechnique, France)

Jean-Paul Booth is a CNRS research director at the Laboratoire de Physique de Plasmas at Ecole Polytechnique near Paris. In 2006-08 he took time away from CNRS to work at Lam Research Corporation in California, where he was a technical director responsible for sensors and endpoint detection applied to plasma etch reactors. Before 2000 he was a CNRS researcher at Université de Grenoble. JP Booth specialises in the experimental study of physics and chemistry occurring in plasmas in reactive gases at low pressures, and their interaction with surfaces. He long focussed on radiofrequency plasmas for materials processing in the microelectronics industry, but is now working on more fundamental questions and rigorous model validation. He has developed and applied many novel optical diagnostic techniques (one- and two-photon laser-induced fluorescence, broad-band absorption spectroscopy, cavity ring-down spectroscopy, synchrotron vacuum-ultraviolet absorption) to measure reactive species densities and kinetics, as well as electrical probes, microwave resonance techniques for plasma physics parameters, and simpler sensors for in-situ control of industrial plasma processes. He also has an interest in the physics of capacitively-coupled radiofrequency plasmas: breakdown, electromagnetic effects in VHF plasmas, tailored voltage waveform excitation for control of ion and electron fluxes and energy distributions.


Key publications:
  1. Optical and Electrical Diagnostics of Fluorocarbon Plasma Etching Processes, J.P. Booth, Plasma Sources, Science and Technology, 8, 249, (1999).
  2. Negative ions in single- and dual-frequency capacitively coupled fluorocarbon plasmas, G A Curley, D Maric, J-P Booth, C S Corr, P Chabert and J Guillon, Plasma Sources Sci. Technol 16 S87-S93 (2007).
  3. Strong Ionization Asymmetry in a Geometrically Symmetric Radio Frequency Capacitively Coupled Plasma Induced by Sawtooth Voltage Waveforms B Bruneau, T Gans, D O’Connell, A Greb, E V. Johnson and JP Booth, Phys. Rev. Lett. 114, 125002 (2015).

Diederik Depla (Ghent University, Belgium)

D. Depla has received his Master Degree in Chemistry in 1991 at Ghent University (Belgium). In 1996 he promoted with a PhD thesis in Solid State Chemistry on spray drying of precursors for superconductors. After a short period as senior scientist in the Department of Solid State Sciences, he became in 1999 Professor at the same department. His research focuses on the fundamental aspects of reactive magnetron sputter deposition. He has shown the importance of ion implantation on this process, and explained the discharge voltage behavior during reactive sputter deposition. In this way, his continuous research in this area resulted in several publications. He is now as full professor head of the research group “Dedicated Research on Advanced Films and Targets” (DRAFT). Under the guidance of D. Depla, the research group has distinguished itself from this rather technological approach, and has set an own course seeking for answers on fundamental questions related to film growth and process control. The unique approach of the research group to tackle these fundamental questions, has propelled the research group to the forefront of the thin film community and we are today recognized as one of the world leading groups in reactive sputtering. A simple “google.com” search on “reactive sputter deposition” immediately shows a few links to the research group or the PI. The American Vacuum Society recently acknowledged the work of D. Depla through the “Bill Sproul Award 2022” “for his persistence to unravel the fundamental processes during reactive magnetron sputter deposition”.


Key publications:
  1. Tutorial : Hysteresis during the reactive magnetron sputtering process, K. Strijckmans, R. Schelfhout, D. Depla, Journal of Applied Physics 124 (2018) 2411011.
  2. Reactive Sputter Deposition, D. Depla, S. Mahieu (editors), Springer Series in Materials Science, Springer Berlin, Heidelberg, New York, 2008, ISBN 978-3-540- 7666-9
  3. Magnetrons, reactive gases and sputtering, D. Depla, ISBN 978-1-304-34781-7 (also available in a Chinese version : 阴极，反应气体和磁控溅射).

Pavel Dvořák (Masaryk University, Czech Republic)


Key publications:

Richard Engeln (ASML, The Netherlands)

Richard Engeln is a principal researcher at ASML, a Dutch company that produces lithography machines for the semi-conductor industry. He is also full professor (part-time) at the Eindhoven University of Technology, where he worked for 22 years before going to ASML. His research focuses on unravelling the chemical kinetics and dynamics in processing plasmas, by developing and employing optical, especially laser-based, diagnostic techniques that can measure densities of plasma species both at high temporal and spatial resolution. At present the main focus of his research is on (EUV-induced) hydrogen-containing plasma, as this type of plasma is present in the latest lithography machines of ASML.


Key publications:

Olivier Guaitella (École Polytechnique, France)

Olivier Guaitella is a researcher of the Non Thermal Plasma group from Laboratory of Plasma Physics in Ecole Polytechnique near Paris. He has received is PhD degree in Physics in 2006 at École Polytechnique, member of Paris Saclay University. His main research interests are focus on plasma surface interactions and their influence on non-equilibrium plasma kinetics at elevated pressure. This work finds applications for indoor air treatment, Plasma/catalyst coupling, plasma in liquids, plasma jets and more recently CO2 recycling after spending a one year secondment in the group of Richard Engeln at Eindhoven University of Technology in 2014. He has also a strong interest in the development of new diagnostics techniques and has especially an expertise in infrared absorption techniques. He is member of the steering committee of the french non thermal plasma network since 2013.


Key publications:
  1. Experimentally obtained values of electric field of an atmospheric pressure plasma jet impinging on a dielectric surface. A Sobota, O Guaitella, E Garcia-Caurel Journal of Physics D: Applied Physics 46 (37), 372001
  2. Modes of underwater discharge propagation in a series of nanosecond successive pulses. I Marinov, O Guaitella, A Rousseau, SM Starikovskaia, Journal of Physics D: Applied Physics 46 (46), 464013
  3. Oxidation of isopropanol and acetone adsorbed on TiO 2 under plasma generated ozone flow: Gas phase and adsorbed species monitoring. C Barakat, P Gravejat, O Guaitella, F Thevenet, A Rousseau, Applied Catalysis B: Environmental 147, 302-313

Tomáš Hoder (Masaryk University, Czech Republic)


Key publications:

Sylvain Iséni (GREMI Orléans, France)

Sylvain ISÉNI was born Gien, France, on October 17th 1988. He graduated from the University of Orléans (France) with a Master of Science and an engineering diploma in 2011. The same year he spends six months as an ERASMUS student in the group of Prof. P. Bruggeman at TU/e Eindhoven (The Netherlands). Starting from 2012, he was a PhD candidate at the Leib­niz In­sti­tu­te for Plas­ma Sci­ence and Tech­no­lo­gy, INP Greifswald where he received his PhD in Physics in 2015 from the University of Greifswald (Germany) with a study focusing on laser diagnostics of an atmospheric pressure plasma jet for biomedical applications. After a post-doc at the Research Group in the Energetics of Ionized Media -GREMI- in Orléans, (France), he obtain a full researcher position at the French National Center for Scientific Research (CNRS) in 2017. His research topics deal with non-equilibrium –non-thermal– plasmas and plasma processes for environmental and biological purposes. This involves the development of original micro-plasma sources and the study of elementary processes in discharges and plasma-liquid interaction. His working field is also dealing with plasma diagnostics with a strong focus on optical emission spectroscopy to study key plasma parameters (e.g. electric field, electron density, neutral gas temperature, hydrodynamics...). He is also interested in laser diagnostics method to measure absolute densities of reactive species.


Key publications:
  1. Atmospheric pressure streamer follows the turbulent argon air boundary in a MHz argon plasma jet investigated by OH-tracer PLIF spectroscopy. S Iseni A Schmidt-Bleker J Winter K-D Weltmann, S Reuter, Journal of Physics D: Applied Physics 47, 152001–152001 (2014 )
  2. Nitrogen metastable (N2(A3 Σu+)) in a cold argon atmospheric pressure plasma jet: Shielding and gas composition. S Iseni P Bruggeman, K-D Weltmann, S Reuter, Applied Physics Letters 108, 184101–184101 (2016)
  3. On the validity of neutral gas temperature by emission spectroscopy in micro-discharges close to atmospheric pressure. S Iseni, R Michaud, P Lefaucheux, G B Sretenović, V, Schulz-von der Gathen, R Dussart, Plasma Sources Sci. Technol. 28, 065003 (2019)

Holger Kersten (Christian-Albrechts-Universität Kiel, Germany)

Holger Kersten is a Professor at the Institute of Experimental and Applied Physics at University of Kiel, Germany since 2006. Prior Professor Kersten was the head of the plasma processes group at the Leibniz Institute for Plasma Science and Technology (INP Greifswald) in Greifswald, Germany. The focus of his research includes basic studies and diagnostics on the interaction of plasmas with surfaces, complex plasmas and their applications in plasma technology. In particular, Kersten is working in plasma diagnostics by non-conventional methods as calorimetric probes and force probes for the determination of energy and momentum fluxes. Since a few years his research interest is also related to historical aspects of gas dicharges and plasma physics. In 1999, he received the Greifswald Plasma Physics Prize in recognition of his research and in 2025 the Rudolf-Jaeckel award of the German Vacuum Society. Professor Kersten was the president of the German Society for Plasma Technology from 2009 to 2013. From 2015 until 2019 and since 2025 again he is an Editor-in-Chief of the European Physical Journal D (EPJD). In 2019 Kersten was the chair of the ICPIG conference and in 2024 of the PSE conference.


Key publications:
  1. Experimental unraveling the energy flux originating from a DC magnetron sputtering source. S Gauter, F Haase, H Kersten, Thin Solid Films 669(2019), 8-18. (doi: 10.1016/j.tsf.2018.10.021)
  2. Nanoparticle forming reactive plasmas: A multidiagnostic approach. A Hinz, E von Wahl, F Faupel, T Strunskus, H Kersten, Eur. Phys. J. D 72(2018), 91. (doi: 10.1140/epjd/e2017-80372-6)
  3. Foundations of measurement of electrons, ions and species fluxes towards surfaces in low-temperature plasmas. J Benedikt, H Kersten, A Piel, Plasma Sources Sci. Technol. 30(2021), 033001. (doi:10.1088/1361-6595/abe4bf)

Stephanos Konstantinidis (University of Mons, Belgium)

Stephanos Konstantinidis was born in Athens in 1978. He is currently Research Director at the National Fund for Scientific Research (FNRS, Belgium) and professor at the University of Mons in Belgium. During his doctoral thesis (UMONS 2004), Stephanos contributed to the fundamental understanding of ionized magnetron sputter deposition technology, in particular towards the development of High-Power Impulse Magnetron Sputtering (HiPIMS) processes. At ChIPS lab, he studies plasma-surface interactions and thin film deposition by combining both advanced plasma analysis and surface characterization methods. He’s also developing sputtering-based processes for the synthesis of nanomaterials.


Key publications:
  1. High power pulsed magnetron sputtering: a review on scientific and engineering state of the art, K. Sarakinos, J. Alami and S. Konstantinidis , Surf. Coatings Technol. 204, 1661–1684 (2010).
  2. Oxygen vacancy stabilized zirconia (OVSZ); a joint experimental and theoretical study. M. Raza, S. Konstantinidis et al, Scripta Materialia, 124, 26–29 (2016).
  3. Sputtering onto liquids: a critical review, A. Sergievskaya, A. Chauvin and S. Konstantinidis, Beilstein J. Nanotechnol. 13, 10–53 (2022).

Tony Murphy (CSIRO, Australia)

Tony Murphy was born in Sydney, Australia, too many years ago. He received a PhD in Physics from the University of Sydney and subsequently completed a postdoc at Max-Planck-Institut für Plasmaphysik in Munich. Since 1989, he has worked at CSIRO, Australia’s leading government research organisation, where he is now a Chief Research Scientist. (A prize will be awarded to all who can say what CSIRO stands for.) Tony’s main research area is thermal plasma processes, including arc welding, metallurgical applications, waste treatment, and plasma property calculation. In the past few years, he has also been active in plasma catalysis. He was a member of the team that developed the PLASCON waste destruction process and has led plasma modelling projects with several companies, including General Motors, Boeing, and China Rail and Rolling Stock Corporation. He has published over 300 refereed journal papers and has been awarded research medals and prizes by the International Plasma Chemistry Society, European Physical Society, Association of Asia-Pacific Physical Societies, Institute of Physics (UK), Australian Academy of Science, Australian Institute of Physics, NSW Government and Royal Society of NSW. He is Editor-in-Chief of Plasma Chemistry and Plasma Processing, an Associate Editor of Journal of Manufacturing Processes, and a member of the Editorial Boards of Journal of Physics D: Applied Physics, Reviews of Modern Plasma Physics, Welding in the World and Plasma Science and Technology; you are encouraged to submit your best work to these journals.


Key publications:
  1. Foundations of high-pressure thermal plasmas. A B Murphy, D Uhrlandt, Plasma Sources Sci. Technol. 27 063001 (2018).
  2. A perspective on arc welding research: the importance of the arc, unresolved questions and future directions. A B Murphy, Plasma Chem. Plasma Process. 35 471–489 (2015).
  3. Thermodynamic properties and transport coefficients of arc lamp plasmas: argon, krypton and xenon. A B Murphy, E. Tam, J. Phys. D: Appl. Phys. 47 295202 (2014).

Marina Prenzel (Ruhr-University Bochum, Germany)

Marina Prenzel is Science Manager of the Research Department 'Plasmas with Complex Interactions' at Ruhr-Universität Bochum (RD Plasma). She received her Ph.D. in physics in 2013 on a study of reactive magnetron sputtering. For three years she worked as a Potdoc at the Max-Planck-Institute for Chemical Energy Conversion in Mülheim (Germany) and moved at the beginning of 2017 back again to RUB, where she is responsible for the scientific organisation of the RD Plasma.


Key publications:
  1. Investigation of different pre-treated multi-walled carbon nanotubes by Raman spectroscopy. P Düngen, M Prenzel, C Van Stappen, N Pfänder, S Heumann, R Schlögl, Materials Sciences and Applications 8 (8), 628-641 (2017)
  2. Formation of crystalline gamma-Al2O3 induced by variable substrate biasing during reactive magnetron sputtering. M Prenzel, A Kortmann, A von Keudell, F Nahif, J M Schneider, M Shihab, R P Brinkmann, J. Phys. D.: Appl. Phys. 46 (8), (2013) 084004
  3. Ion-induced secondary electron emission of oxidized nickel and copper studied in beam experiments. R Buschhaus et al 2022 Plasma Sources Sci. Technol. 31 025017

Antonio Tejero-del-Caz (University of Cordoba, Spain)

Antonio Tejero-del-Caz was born in Córdoba, Spain, on October 15th 1987. He received his PhD degree in Physics in June 2016, from the University of Córdoba (Spain). Antonio Tejero-del-Caz specialised in high-performance computing, GPGPU, and the development of CUDA enabled PIC algorithms for the study of sheaths in low pressure plasma and plasma-solid interaction. From September 2016 he is a postdoctoral researcher at Instituto de Plasmas e Fusão Nuclear within Instituto Superior Técnico (Portugal) where he is working in the N-Plasmas Reactive: Modelling and Engineering (N-PRiME) group. His current research is focused in the modelling and simulation of low-temperature plasmas of interest for biological and environmental applications. He is the main developer of the LisbOn KInetics (LoKI) tool suit, a set of computational tools to obtain numerical solutions of the electron Boltzmann equation (LoKI-B) and its self-consistent coupling with a global model to study the plasma chemistry (LoKI-C).


Key publications:
  1. Experimental radial motion to orbital motion transition in cylindrical Langmuir probes in low pressure plasmas. J M Díaz-Cabrera, J Ballesteros, J I F Palop, A Tejero-del-Caz, Plasma Sources Sci. Technol. 24 (2015) 25026. doi:10.1088/0963-0252/24/2/025026.
  2. Radial-to-orbital motion transition in cylindrical Langmuir probes studied with particle-in-cell simulations. A Tejero-del-Caz, J I Fernández Palop, JM Díaz-Cabrera, J Ballesteros, Plasma Sources Sci. Technol. 25 (2016) 01LT03. doi:10.1088/0963-0252/25/1/01LT03
  3. Ion injection in electrostatic particle-in-cell simulations of the ion sheath. A Tejero-del-Caz, J I Fernández Palop, J M Díaz-Cabrera, G F Regodón, R Carmona-Cabezas, J Ballesteros, J. Comput. Phys. 350 (2017) 747–758. doi:10.1016/j.jcp.2017.09.018

Achim von Keudell (Ruhr-University Bochum, Germany)

Achim von Keudell is professor for experimental physics at Ruhr-University Bochum since 2003. Before, he was staff scientist at the Max Planck Institute for Plasma Physics in Munich. A. von Keudell specialised in plasma and surfaces physics. His experience encompasses in-situ ellipsometry, infrared spectroscopy and treatment of surfaces with plasma discharges. His group has been the first to quantify elementary surface processes in plasma surface interactions involving hydrocarbon radicals and hydrogen atoms. These serve as model experiments for the understanding of thin film growth in glow discharges. The projects until 2010 focussed on plasma technology particularly with regard to clusters in plasmas and plasma sterilisation. Since a few years, the research on reactive microplasmas developed with the emphasis on the fundamental understanding of the reaction chemistry as well as on on reactive magnetron sputtering and HPPMS discharges.


Key publications:
  1. Direct insertion of SiH3 radicals into strained Si-Si surface bonds during plasma deposition of hydrogenated amorphous silicon films. A von Keudell, J R Abelson, Phys. Rev. B. 59, 5791 (1999)
  2. Elementary processes in plasma-surface interaction:H-atom and ion-induced chemisorption of methyl on hydrocarbon film surfaces (review). A von Keudell, W Jacob, Progress in Surface Science 26, 21-54 (2004)

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